Scanning Electron Microscope

Hitachi SU8200 Series Ultimate Cold Field Emission SEM

SU8230: Large chamber/large stage model

Hitachi’s next generation Cold Field Emission SEM offers unmatched low‑voltage imaging and comprehensive analytical microanalysis with the uncompromised performance of CFE.

The 8200 Series FE-SEM employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.

New Source and Detection Technology from Hitachi:

• Increased probe current for S/N and analytical performance
• Unparalleled imaging throughput with improved CFE beam stability
• Enhanced deceleration and selective energy filter providing fine contrast differentiation at low accelerating voltages

The members of the SU8200 family offer a variety of stage, specimen chamber and signal detection system configurations to meet the wide range of customer-specific needs for indispensable ultra-high-resolution microscopy in the nanotechnology fields, such as semiconductors, electronics, catalysis and other functional materials, biotechnology, pharmaceuticals, and more. 

Silicon Drift Detector (SDD) – X-Max^N

Launched in August 2012, the new X-Max^Nrange of Silicon Drift Detector exploits a new sensor chips, new electronics, and innovative packaging to deliver a truly ‘next generation’ SDD performance.

The X-Max^N Silicon Drift Detector comes in a range of detector sizes, from 20 mm² for microanalysis up to an astounding 150 mm² for advanced nanoanalysis. The latter is the largest SDD in the market and delivers more than double the speed of any other detector.

Overview

• A range of silicon drift detector sizes, from 150 mm² to 20 mm²
• X-Max^N provides a superb resolution that is independent of sensor size – specifications guaranteed to ISO15632:2012
• The same mechanical geometry inside the microscope means that the count rate simply increases in proportion to sensor size
• Excellent low energy analysis, including Be detection guaranteed on all sensor sizes
• Fits to SEMs and FIBs using the same interface as the previous generation X-Max
• Up to four X-Max^N can run in parallel on one microscope to create a system with a total active area of 600 mm²

Associated Staff

Patrick Woodell, Lab Manager
pwoodell@discoverarc.com

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